Combined topography and AC field probing with a micromachined SFM tip for building in reliability

We introduce a new concept for combined probing of topography and local AC fields and report some early results of tip fabrication and measurements. Because this instrument can be used to measure both AC fields and topography with nanometer-level localization, we call it a Nanoscilloscope. This new instrument promises to be particularly useful for proactive reliability engineering because it can simultaneously image dynamic electric fields (i.e. signals) and sample topography, but unlike electron-beam probing, it operates in ambient conditions.