论文信息 - Additive lithography for fabrication of diffractive optics.

Additive lithography for fabrication of diffractive optics.

An innovative fabrication technique is introduced that is based on multiple-exposure techniques for micro-optics fabrication. This method utilizes various exposure times and combinations of binary and analog photo masks to sculpture complex photoresist profiles. It also demonstrates the fabrication of analog structures from the multilevel structures thus formed by using resist reflow.

Heidi Hockel | Mahesh Pitchumani | Waleed Mohammed | Eric G Johnson

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