Metrologies for quantitative nanomechanical testing and quality control in semiconductor manufacturing

If nanomechanical testing is to evolve into a tool for process and quality control in semiconductor fabrication, great advances in throughput, repeatability, and accuracy of the associated instruments and measurements will be required. A recent grant awarded by the NIST Advanced Technology Program seeks to address the throughput issue by developing a high-speed AFM-based platform for quantitative nanomechanical measurements. The following paper speaks to the issue of quantitative accuracy by presenting an overview of various standards and techniques under development at NIST and other national metrology institutes (NMIs) that can provide a metrological basis for nanomechanical testing. The infrastructure we describe places firm emphasis on traceability to the International System of Units, paving the way for truly quantitative, rather than qualitative, physical property testing.

[1]  R. Seugling,et al.  Traceable Force Metrology for Micronewton Level Calibration | NIST , 2004 .

[2]  R.L. Steiner,et al.  Status of the NIST "electronic kilogram" experiment , 2002, Conference Digest Conference on Precision Electromagnetic Measurements.

[3]  J. Villarrubia.  Scanned probe microscope tip characterization without calibrated tip characterizers , 1996 .

[4]  Edwin R. Williams,et al.  Accurate Measurement of the Planck Constant , 1998 .

[5]  James D. Holbery,et al.  Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus , 2000 .

[6]  Joseph A. Turner,et al.  Atomic force acoustic microscopy methods to determine thin-film elastic properties , 2003 .

[7]  Z. J. Jabbour,et al.  The Kilogram and Measurements of Mass and Force , 2001, Journal of research of the National Institute of Standards and Technology.

[8]  John S. Villarrubia,et al.  Nanoindentation of polymers: an overview , 2001 .

[9]  John Hedley,et al.  Accurate analytical measurements in the atomic force microscope: a microfabricated spring constant standard potentially traceable to the SI , 2003, Nanotechnology.

[10]  Jon R. Pratt,et al.  Precision and accuracy of thermal calibration of atomic force microscopy cantilevers , 2006 .

[11]  John Hedley,et al.  Quantitative analytical atomic force microscopy: a cantilever reference device for easy and accurate AFM spring-constant calibration , 2004 .

[12]  Jon R. Pratt,et al.  Progress toward Système International d’Unités traceable force metrology for nanomechanics , 2004 .

[13]  Martyn C. Davies,et al.  Comparison of calibration methods for atomic-force microscopy cantilevers , 2002 .

[14]  Lowell P. Howard,et al.  Accurate force measurements for miniature mechanical systems: a review of progress , 1997, Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components.

[15]  Richard K. Leach,et al.  Design of a bi-directional electrostatic actuator for realising nanonewton to micronewton forces. , 2004 .

[16]  Jon R. Pratt,et al.  Probe-Force Calibration Experiments Using the NIST Electrostatic Force Balance | NIST , 2003 .

[17]  J. Houston,et al.  A new force sensor incorporating force‐feedback control for interfacial force microscopy , 1991 .

[18]  T. Funck,et al.  Determination of the volt with the improved PTB voltage balance , 1990 .

[19]  G. Pharr,et al.  An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments , 1992 .

[20]  Marco Tortonese,et al.  Characterization of application-specific probes for SPMs , 1997, Photonics West.

[21]  Bryan Kibble,et al.  A Realization of the SI Watt by the NPL Moving-coil Balance , 1990 .

[22]  J. Lawall,et al.  Michelson Interferometry With 10 PM Accuracy , 2000 .

[23]  Jon R. Pratt,et al.  Microforce and Instrumented Indentation Research at the National Institute of Standards and Technology, Gaithersburg, MD | NIST , 2003 .

[24]  Jon R. Pratt,et al.  A Flexure Balance With Adjustable Restoring Torque for Nanonewton Force Measurement | NIST , 2002 .

[25]  Jon R. Pratt,et al.  The NIST microforce realization and measurement project , 2002, Conference Digest Conference on Precision Electromagnetic Measurements.

[26]  Lutz Doering,et al.  Piezoresistive cantilever as portable micro force calibration standard , 2003 .

[27]  S. Woody,et al.  Compact Force Sensors for Low-Force Mechanical Probe Calibration | NIST , 2002 .