High-resolution 128 x 96 nitride microdisplay

Matrix-addressable arrays of InGaN micro-light-emitting diodes with 128 /spl times/ 96 pixels and a resolution of 1200 dpi have been fabricated using a novel "sloped sidewall" process. The devices have been fabricated on InGaN blue and green wafers, emitting light at the wavelengths of 468 and 508 nm, respectively. A simple circuit, which enables the display of an arrow pattern with /spl sim/60% of the pixels turned on, was used for device testing. At an injection current of 60 mA, the devices deliver 3.3 (blue) and 2.4 mW (green) of output power, corresponding to a luminance of more than 30 000 Cd/m/sup 2/. These high-brightness and highly versatile devices are certainly an attractive form of emissive micro-display.

[1]  T. Mukai,et al.  Recent progress in group-III nitride light-emitting diodes , 2002 .

[2]  Jing Li,et al.  III-nitride blue microdisplays , 2001 .

[3]  M. Dawson,et al.  Fabrication of matrix-addressable InGaN-based microdisplays of high array density , 2003, IEEE Photonics Technology Letters.

[4]  S. Denbaars,et al.  Investigation of Sidewall Recombination in GaN Using a Quantum Well Probe , 2000 .

[5]  Susanne M. Lee,et al.  Comparison of improved operating parameters of five different wavelength LEDs for significantly brighter illumination , 2001, SPIE OPTO.

[6]  Hongxing Jiang,et al.  GaN microdisk light emitting diodes , 2000 .

[7]  Haiqing Lin,et al.  An 852/spl times/600 pixel OLED-on-silicon color microdisplay chip using CMOS sub-threshold-voltage-scaling current driver , 2002 .

[8]  Shuji Nakamura,et al.  The Roles of Structural Imperfections in InGaN-Based Blue Light-Emitting Diodes and Laser Diodes , 1998 .

[9]  Hiap L. Ong.  Microdisplay opportunity: small size, low power, big image, bright future , 1998, Other Conferences.

[10]  E. F. Schubert,et al.  Current crowding in GaN/InGaN light emitting diodes on insulating substrates , 2001 .

[11]  Arto V. Nurmikko,et al.  A Matrix Addressable 1024 Element Blue Light Emitting InGaN QW Diode Array , 2001 .

[12]  Hongxing Jiang,et al.  Size dependence of III-nitride microdisk light-emitting diode characteristics , 2001 .

[13]  O. Prache,et al.  Active matrix molecular OLED microdisplays , 2001 .