Proceedings, IEEE the Sixteenth Annual International Conference on Micro Electro Mechanical Systems : Kyoto, Japan, January 19-23, 2003

A study of micro electro mechanical systems. The papers that make up the volume constitute the proceedings of the 16th IEEE Micro Electro Mechanical Systems Conference (MEMS), held in 2003. Topics discussed include: nanodevice and NEMS; light and bio manipulation; and fabrication.