论文信息 - The manufacture of microlenses by melting photoresist

The manufacture of microlenses by melting photoresist

It has been shown that it is possible to to generate very small lenses by melting 'islands' of photoresist on a glass substrate. The authors have made lenses with diameters ranging from 5 mu m to 750 mu m in the form of spheres, cylinders and crossed cylinders and have studied their optical properties. Lenses with numerical apertures between 0.5 and 0.2 may be made close to diffraction limited but those of lower numerical aperture can only be achieved using more complex techniques.

M. Hutley | R. Stevens | N. Davies | D. Daly

[1] G. Lippmann,et al. Epreuves reversibles. Photographies integrals , 1908 .

[2] Properties and fabrication of micro fresnel zone plates. , 1973, Applied optics.

[3] Walter T Welford. Aberrations of the symmetrical optical system , 1974 .

[4] J W Goodman,et al. Fully parallel, high-speed incoherent optical method for performing discrete Fourier transforms. , 1978, Optics letters.

[5] J D Rees,et al. Non-Gaussian imaging properties of GRIN fiber lens arrays. , 1982, Applied optics.

[6] Y. Ishihara,et al. A high photosensitive IL-CCD image sensor with monolithic resin lens array , 1983, 1983 International Electron Devices Meeting.

[7] James J. Cowan. The Recording And Large Scale Replication Of Crossed Holographic Grating Arrays Using Multiple Beam Interferometry , 1984, Optics & Photonics.

[8] H. Nishihara,et al. I Micro Fresnel Lenses , 1987 .

[9] L. Hornak. Fresnel phase plate lenses for through-wafer optical interconnections. , 1987, Applied optics.

[10] R. E. Burge,et al. Computer generated optical fan-out element , 1988 .

[11] James C. Kirsch,et al. Design Of Photopolymer Holograms For Optical Interconnect Applications , 1988 .

[12] G. Connell,et al. Technique for monolithic fabrication of microlens arrays. , 1988, Applied optics.

[13] M. C. Hutley. Optical Techniques for the Generation of Microlens Arrays , 1990 .