Experimental benchmark of kinetic simulations of capacitively coupled plasmas in molecular gases
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J. Schulze | Z. Donkó | M. Koepke | J. Booth | T. Lafleur | A. Derzsi | S. Brandt | I. Korolov | B. Berger | B. Bruneau | P. Hartmann | T. Gans | A. Gibson | D. O’Connell | E. Johnson