Modelling, dynamic analysis and control of micromachined rate gyroscopes

Abstract This paper presents a method to analyze the dynamic behavior of rate gyroscopes (angular rate sensors) and to design the control loops for different device layouts of rate gyroscopes by modelling the micromachined rate gyroscope structures. In contrast to the usual static simulations, in this paper a coupled spring-mass-modcl is used, which allows the prediction of the dynamic behaviors also in case of production tolerances. Controllers in the drive-loop and detection-loop combined with capacitive readout are designed to achieve better linearity and increase the bandwidth.