Research on Reliability of GaAs Microwave Monolithic Integrated Circuit (MMIC)

The development in the research on reliability of GaAs microwave monolithic integrated circuit (MMIC) has been introduced in this paper. The emphasis is placed on the reliability assurance technology aspects of MMIC devices, such as Technology Characterization Vehicle (TCV), Process Control Monitor (PCM) and Statistical Process Control (SPC), so as to offer a new approach for the research on reliability of GaAs MMIC.