5-Axis Control Ultraprecision Micromachining of Axial-Flow Pump as a 3-D Micropart

Norikazu Kitamura1, Yasuhiro Sakaida2, Tomohiko Kawai2, Yoshinobu Tsujimoto3, Yoshimi Takeuchi1 1Dept. of Computer-Controlled Mechanical Systems, Graduate School of Engineering, Osaka Univ. Yamadaoka 2-1, Suita, Osaka, 560-0871, JAPAN 2Robomachine Laboratory, FANUC LTD. Oshino-mura, Yamanashi, 401-0597, JAPAN 3Dept. of Mechanical Science and Bioengineering, Gradutate School of Engineering Science, Osaka Univ. Machikaneyama-tyou, Toyonaka, Osaka, 560-8531, JAPAN