Experimental Study on Displacement Self-Sensing Method Based on Multiple Piezoelectric Effects for Microactuators

The integration of piezoelectric sensors and actuators has been a new development trend of the piezoelectricity. According to bidirectional and reversible characteristics of multiple piezoelectric effects, the displacement self-sensing method based on multiple piezoelectric effects for the piezoelectric microactuators is studied. The method is further verified on a self-developed microdisplacement mechanism through establishing an experimental testing system in this paper. The output displacements measured by the standard displacement sensor and the output voltages from the displacement self-sensing circuit are obtained for the microactuator respectively. Their relationship is obtained through the normalization to both experimental results. It shows that the curve of output voltages is consistent with that of the measurement displacements. Therefore, the method can obtain the output displacement signal of piezoelectric actuators very well. It proves that the method is easier to application on the practical engineering than the method of electric bridge circuit. Meanwhile, the experiments further verify that the secondary direct piezoelectric effect of piezoelectric materials enhances dielectric properties and makes the dielectric coefficient large.

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