论文信息 - Surface conductivity of the insulator of an MIS or MIM device

Surface conductivity of the insulator of an MIS or MIM device

Abstract A method for measuring the surface resistivity of the insulator of an MIS or an MIM device is described. The variation of the surface resistivity with relative humidity has been studied for various insulators. The results obtained are explained through the B.E.T. adsorption theory, and a model of conduction in the adsorbed layer is proposed.

R. Castagne | P. Hesto | A. Vapaille

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