A CMOS SPAD Line Sensor With Per-Pixel Histogramming TDC for Time-Resolved Multispectral Imaging

A 512 <inline-formula> <tex-math notation="LaTeX">$\times $ </tex-math></inline-formula> 16 single photon avalanche diode (SPAD)-based line sensor is designed in a 0.13-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> CMOS image sensor technology for time-resolved multispectral beam scanned imaging. The sensor has 23.78-<inline-formula> <tex-math notation="LaTeX">$\mu \text{m}$ </tex-math></inline-formula> pixel pitch and incorporates one SPAD array with 49.31% fill factor optimized for detection in the blue–green spectral region, and a second array at 15.75% fill factor optimized for the red-near-infrared response spectral region. Each pixel contains a 32-bin histogramming time-to-digital converter (TDC) with a mean time resolution of 51.20 ps. Histogram bin resolutions are adjustable from 51.20 ps to 6.55 ns per bin. The line sensor can operate in single photon counting (SPC) mode (102.1 giga-events/s), time-correlated SPC (TCSPC) mode (192.4 million-events/s) or on-chip histogramming mode (16.5 giga-events/s), increasing the count rate up to 85 times compared to TCSPC mode. Sensor capability is demonstrated through spectral fluorescence lifetime imaging, resolving three fluorophore populations with distinct fluorophore lifetimes.

[1]  David Tyndall,et al.  A study of pile-up in integrated time-correlated single photon counting systems. , 2013, The Review of scientific instruments.

[2]  J. Doernberg,et al.  Full-speed testing of A/D converters , 1984 .

[3]  I Rech,et al.  High-speed and low-distortion solution for time-correlated single photon counting measurements: A theoretical analysis. , 2017, The Review of scientific instruments.

[4]  Nikola Krstajić,et al.  256 × 2 SPAD line sensor for time resolved fluorescence spectroscopy. , 2015, Optics express.

[5]  Marcus Sackrow,et al.  Fluorescence decay data analysis correcting for detector pulse pile-up at very high count rates , 2017, 1711.01137.

[6]  Józef Kalisz,et al.  Review of methods for time interval measurements with picosecond resolution , 2004 .

[7]  Oscar Almer,et al.  A CMOS SPAD Sensor With a Multi-Event Folded Flash Time-to-Digital Converter for Ultra-Fast Optical Transient Capture , 2018, IEEE Sensors Journal.

[8]  K. König,et al.  Fluorescence lifetime imaging by time‐correlated single‐photon counting , 2004, Microscopy research and technique.

[9]  David Tyndall,et al.  Time-Domain Fluorescence Lifetime Imaging Techniques Suitable for Solid-State Imaging Sensor Arrays , 2012, Sensors.

[10]  S. Achilefu,et al.  Fluorescence lifetime measurements and biological imaging. , 2010, Chemical reviews.

[11]  Andrew J. Holmes,et al.  11.5 A time-correlated single-photon-counting sensor with 14GS/S histogramming time-to-digital converter , 2015, 2015 IEEE International Solid-State Circuits Conference - (ISSCC) Digest of Technical Papers.

[12]  Nikola Krstajic,et al.  A 16.5 giga events/s 1024 × 8 SPAD line sensor with per-pixel zoomable 50ps-6.4ns/bin histogramming TDC , 2017, 2017 Symposium on VLSI Circuits.

[13]  Edoardo Charbon,et al.  A Time-Resolved, Low-Noise Single-Photon Image Sensor Fabricated in Deep-Submicron CMOS Technology , 2012, IEEE Journal of Solid-State Circuits.

[14]  Robert K. Henderson,et al.  Digital Silicon Photomultipliers With OR/XOR Pulse Combining Techniques , 2016, IEEE Transactions on Electron Devices.

[15]  R. Henderson,et al.  High fill factor digital Silicon Photomultiplier structures in 130nm CMOS imaging technology , 2012, 2012 IEEE Nuclear Science Symposium and Medical Imaging Conference Record (NSS/MIC).

[16]  S. Pellegrini,et al.  Fully industrialised single photon avalanche diodes , 2017, Commercial + Scientific Sensing and Imaging.

[17]  Edoardo Charbon,et al.  LinoSPAD: a time-resolved 256×1 CMOS SPAD line sensor system featuring 64 FPGA-based TDC channels running at up to 8.5 giga-events per second , 2016, Photonics Europe.

[18]  Juha Kostamovaara,et al.  A 4 × 128 SPAD array with a 78-ps 512-channel TDC for time-gated pulsed Raman spectroscopy , 2015 .

[19]  Nan Guo,et al.  CMOS Time-Resolved, Contact, and Multispectral Fluorescence Imaging for DNA Molecular Diagnostics , 2014, Sensors.

[20]  J A Richardson,et al.  Scaleable Single-Photon Avalanche Diode Structures in Nanometer CMOS Technology , 2011, IEEE Transactions on Electron Devices.

[21]  Martin Wolf,et al.  A 1 × 400 Backside-Illuminated SPAD Sensor With 49.7 ps Resolution, 30 pJ/Sample TDCs Fabricated in 3D CMOS Technology for Near-Infrared Optical Tomography , 2015, IEEE Journal of Solid-State Circuits.

[22]  Matteo Perenzoni,et al.  A Fully Digital 8$\,\times\,$16 SiPM Array for PET Applications With Per-Pixel TDCs and Real-Time Energy Output , 2014, IEEE Journal of Solid-State Circuits.

[23]  Kenneth L. Shepard,et al.  A 100 fps, Time-Correlated Single-Photon-Counting-Based Fluorescence-Lifetime Imager in 130 nm CMOS , 2014, IEEE Journal of Solid-State Circuits.

[24]  M. Ghioni,et al.  Readout Architectures for High Efficiency in Time-Correlated Single Photon Counting Experiments—Analysis and Review , 2017, IEEE Photonics Journal.

[25]  R. K. Henderson,et al.  A Single-Photon Avalanche Diode in 90-nm CMOS Imaging Technology With 44% Photon Detection Efficiency at 690 nm , 2012, IEEE Electron Device Letters.

[26]  B. Vojnovic.  Advanced Time‐Correlated Single Photon Counting Techniques , 2006 .

[27]  N. Krstajić,et al.  Time-resolved spectroscopy at 19,000 lines per second using a CMOS SPAD line array enables advanced biophotonics applications. , 2017, Optics express.

[28]  M. Jamal Deen,et al.  CMOS SPADs: Design Issues and Research Challenges for Detectors, Circuits, and Arrays , 2014, IEEE Journal of Selected Topics in Quantum Electronics.

[29]  Edoardo Charbon,et al.  A 32×32 50ps resolution 10 bit time to digital converter array in 130nm CMOS for time correlated imaging , 2009, 2009 IEEE Custom Integrated Circuits Conference.

[30]  David Stoppa,et al.  A SPAD-based pixel linear array for high-speed time-gated fluorescence lifetime imaging , 2009, 2009 Proceedings of ESSCIRC.

[31]  Nikola Krstajic,et al.  Time-zoomable FRET spectroscopy with a 512 x16 SPAD line sensor , 2018, BiOS.

[32]  Clemens F Kaminski,et al.  Fast and simple spectral FLIM for biochemical and medical imaging. , 2015, Optics express.

[33]  I Rech,et al.  Improving the counting efficiency in time-correlated single photon counting experiments by dead-time optimization. , 2015, The Review of scientific instruments.

[34]  M. Deen,et al.  High-Speed, Single-Photon Avalanche-Photodiode Imager for Biomedical Applications , 2011, IEEE Sensors Journal.

[35]  David Tyndall,et al.  A High-Throughput Time-Resolved Mini-Silicon Photomultiplier With Embedded Fluorescence Lifetime Estimation in 0.13 $\mu$m CMOS , 2012, IEEE Transactions on Biomedical Circuits and Systems.

[36]  Edoardo Charbon,et al.  A 1024$\,\times\,$ 8, 700-ps Time-Gated SPAD Line Sensor for Planetary Surface Exploration With Laser Raman Spectroscopy and LIBS , 2014, IEEE Journal of Solid-State Circuits.