论文信息 - Process Technology Optimization Using An Integrated Process and Device Simulation Sequencing System

Process Technology Optimization Using An Integrated Process and Device Simulation Sequencing System

In this paper, we discuss a system for performing process optimization, and its application to the optimization of a 0.5μm CMOS process. The approach includes an initial Target-Oriented experimental design strategy, elimination of ineffective parameters, a second set of experiments to determine a set of approximating models for each response, detection of appropriate transformations of input factors which improve the accuracy of the models, and optimization with respect to a set of constraints.

Rudi Cartuyvels | Richard Booth | Luc Dupas | Kristim De Meyer

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