Diagnostics of ballistic electrons in a dc/rf hybrid capacitively coupled discharge

The energy distribution of ballistic electrons in a dc/rf hybrid parallel-plate capacitively coupled plasma reactor was measured. Ballistic electrons originated as secondaries produced by ion and electron bombardment of the electrodes. The energy distribution of ballistic electrons peaked at the value of the negative bias applied to the dc electrode. As that bias became more negative, the ballistic electron current on the rf substrate electrode increased dramatically. The ion current on the dc electrode also increased.

[1]  P. Rolland Low‐Frequency Electronic Oscillations in Plasma Beam Interaction , 1965 .

[2]  K. Sauer,et al.  Electron beam-plasma interaction: Linear theory and Vlasov-Poisson simulations , 2007 .

[3]  A. Phelps,et al.  Cold-cathode discharges and breakdown in argon: surface and gas phase production of secondary electrons , 1999 .

[4]  D. Rose,et al.  Comparison of particle-in-cell simulations and a wave-population model of electron-beam-plasma interactions , 2002 .

[5]  A. Lichtenberg,et al.  Secondary electrons in rf and dc/rf capacitive discharges , 2008 .

[6]  Yoshiyuki Sakai,et al.  An Energy Resolution Formula of a Three Plane Grids Retarding Field Energy Analyzer , 1985 .

[7]  F. Pimpec,et al.  Electron conditioning of technical aluminium surfaces: Effect on the secondary electron yield , 2004, physics/0412106.

[8]  A. Lichtenberg,et al.  Capacitive discharges driven by combined dc/rf sources , 2007 .

[9]  S. Vrhovac,et al.  Energy distributions of electrons in a low-current self-sustained nitrogen discharge , 2001 .

[10]  G. Collins,et al.  Reduction of microtrenching and island formation in oxide plasma etching by employing electron beam charge neutralization , 2001 .

[11]  A. Lichtenberg,et al.  Principles of Plasma Discharges and Materials Processing: Lieberman/Plasma 2e , 2005 .

[12]  A. Lichtenberg,et al.  Principles of Plasma Discharges and Materials Processing , 1994 .

[13]  J. Dawson,et al.  Interaction of a Highly Energetic Electron Beam with a Dense Plasma. , 1972 .

[14]  G. Collins,et al.  Secondary electron energy spectra emitted from radio frequency biased plasma electrodes , 1999 .

[15]  S. Vrhovac,et al.  Electron energy distribution functions in weakly ionized argon , 1992 .

[16]  H. Sugai,et al.  A Radio Frequency Driven DC Electron Beam Source , 1999 .

[17]  J. Forster,et al.  Nonlinear wave interaction in a magnetron plasma , 2000 .