Multi-criteria layout synthesis of MEMS devices using memetic computing

This paper introduces a multi-objective optimization approach for layout synthesis of MEMS components. A case study of layout synthesis of a comb-driven micro-resonator shows that the approach proposed in this paper can lead to design results accommodating two design objectives, i.e. simultaneous minimization of size and power input of a MEMS device, while investigating optimum geometrical configuration as the main concern. The major contribution of this paper is the application of memetic computing in MEMS design. An evolutionary multi-objective optimization (EMO) technique, in particular non-dominated sorting genetic algorithm (NSGA-II), has been applied to find multiple trade-off solutions followed by a gradient-based local search, i.e. sequential quadratic programming (SQP), to improve the convergence of the obtained Pareto-optimal front. In order to reduce the number of function evaluations in the local search procedure, the obtained non-dominated solutions are clustered in the objective space and consequently, a post-optimality study is manually performed to find out some common design principles among those solutions. Finally, two reasonable design choices have been offered based on manufacturability issues.

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