Morphological algorithms for visual analysis of integrated circuits

Advances in integrated circuits technology lead to a continuous reduction in the size of individual features and to an increase in the size of chips and wafers. Every day it becomes more difficult to carry out tests and controls of quality and it is necessary to devise new techniques for accurate analysis of features, chips, and wafers. One of these procedures, visual inspection, can be achieved automatically by using image analysis techniques, with a high degree of automation and a low labor cost. We present a method for segmenting and classifying integrated circuit images based on one of these techniques: mathematical morphology.

[1]  Muralidhara Subbarao,et al.  Depth recovery from blurred edges , 1988, Proceedings CVPR '88: The Computer Society Conference on Computer Vision and Pattern Recognition.

[2]  Trevor Darrell,et al.  Pyramid based depth from focus , 1988, Proceedings CVPR '88: The Computer Society Conference on Computer Vision and Pattern Recognition.

[3]  Muralidhara Subbarao.  Efficient Depth Recovery through Inverse Optics , 1989 .

[4]  Sal D' Agostino.  A Machine Vision Architecture For Integrated Circuit Inspection , 1989 .

[5]  Jie-gu Li,et al.  A production system for LSI chip anatomizing , 1987, Pattern Recognit. Lett..

[6]  Bernard Courtois,et al.  A new domain for image analysis: VLSI circuits testing, with Romuald, specialized in parallel image processing , 1983, Pattern Recognit. Lett..

[7]  Alan L. Yuille,et al.  A depth recovery algorithm using defocus information , 1989, Proceedings CVPR '89: IEEE Computer Society Conference on Computer Vision and Pattern Recognition.

[8]  E.S. Meieran,et al.  Analysis technology for VLSI fabrication , 1987, Proceedings of the IEEE.

[9]  Masakazu Ejiri,et al.  An Automatic Wafer Inspection System Using Pipelined Image Processing Techniques , 1988, IEEE Trans. Pattern Anal. Mach. Intell..

[10]  Dirk Sischka,et al.  Methods for mask defect detection using local criteria , 1989 .

[11]  Luc Vincent,et al.  Determining watersheds in digital pictures via flooding simulations , 1990, Other Conferences.

[12]  L. F. Pau,et al.  Integrated Testing and Algorithms for Visual Inspection of Integrated Circuits , 1983, IEEE Transactions on Pattern Analysis and Machine Intelligence.

[13]  Jean Serra,et al.  Image Analysis and Mathematical Morphology , 1983 .

[14]  Byron Dom,et al.  The P300: A system for automatic patterned wafer inspection , 1988, Machine Vision and Applications.