Using neural network process models to perform PECVD silicon dioxide recipe synthesis via genetic algorithms
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[1] G. R. Hext,et al. Sequential Application of Simplex Designs in Optimisation and Evolutionary Operation , 1962 .
[2] John A. Nelder,et al. A Simplex Method for Function Minimization , 1965, Comput. J..
[3] John H. Holland,et al. Adaptation in Natural and Artificial Systems: An Introductory Analysis with Applications to Biology, Control, and Artificial Intelligence , 1992 .
[4] P. E. Castro. Compact Numerical Methods for Computers: Linear Algebra and Function Minimization , 1978 .
[5] M. J. D. Powell,et al. A fast algorithm for nonlinearly constrained optimization calculations , 1978 .
[6] D. E. Goldberg,et al. Genetic Algorithms in Search, Optimization & Machine Learning , 1989 .
[7] D. E. Goldberg,et al. Genetic Algorithms in Search , 1989 .
[8] Bharat Bhushan,et al. Stress in silicon dioxide films deposited using chemical vapor deposition techniques and the effect of annealing on these stresses , 1990 .
[9] C. Spanos,et al. Statistical experimental design in plasma etch modeling , 1991 .
[10] Terry R. Turner,et al. Etch process characterization using neural network methodology: a case study , 1992, Other Conferences.
[11] Edward A. Rietman,et al. Use of neural networks in modeling semiconductor manufacturing processes: an example for plasma etch modeling , 1993 .
[12] Chinmoy B. Bose,et al. Neural network models in wafer fabrication , 1993, Defense, Security, and Sensing.
[13] Gary S. May,et al. Advantages of plasma etch modeling using neural networks over statistical techniques , 1993 .
[14] J.F. Frenzel,et al. Genetic algorithms , 1993, IEEE Potentials.
[15] Thomas F. Edgar,et al. Constructing a reliable neural network model for a plasma etching process using limited experimental data , 1994 .
[16] Gary S. May,et al. Modeling the properties of PECVD silicon dioxide films using optimized back-propagation neural networks , 1994 .
[17] Gary S. May,et al. An optimal neural network process model for plasma etching , 1994 .
[18] Mohamad H. Hassoun,et al. Neurocontrollers trained with rules extracted by a genetic assisted reinforcement learning system , 1995, IEEE Trans. Neural Networks.
[19] R. C. Frye,et al. A genetic algorithm for low variance control in semiconductor device manufacturing: some early results , 1996 .