Molecular dynamics simulation of color centers in silicon carbide by helium and dual ion implantation and subsequent annealing
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F. Fang | M. Rommel | Ying Song | Bingsheng Li | Zongwei Xu | R. Zhu | Junlei Zhao | Jintong Wu | Bing Dong | Qiang Li | Kunpeng Zhang | Yexin Fan