A sub-micron capacitive gap process for multiple-metal-electrode lateral micromechanical resonators
暂无分享,去创建一个
[1] Kun Wang,et al. VHF free-free beam high-Q micromechanical resonators , 2000 .
[2] Kun Wang,et al. High-order medium frequency micromechanical electronic filters , 1999 .
[3] J.R. Clark,et al. High-Q VHF micromechanical contour-mode disk resonators , 2000, International Electron Devices Meeting 2000. Technical Digest. IEDM (Cat. No.00CH37138).
[4] C. Nguyen,et al. Frequency-selective MEMS for miniaturized low-power communication devices , 1999 .
[5] Clark T.-C. Nguyen,et al. Anneal-Activated , Tunable , 68 MHz Micromechanical Filters , 1999 .
[6] S. Sherman,et al. Fabrication technology for an integrated surface-micromachined sensor , 1993 .