In-depth Profile Analysis in Metal/high-k Gate Stack Structures Studied by Synchrotron-radiation Photoelectron Spectroscopy
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H. Kumigashira | M. Oshima | S. Toyoda | Ziyuan Liu | T. Sukegawa | H. Kamada | K. Iwamoto
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H. Kumigashira | M. Oshima | S. Toyoda | Ziyuan Liu | T. Sukegawa | H. Kamada | K. Iwamoto