论文信息 - Mechanism of silicon exfoliation by hydrogen implantation and He, Li and Si co-implantation [SOI technology] - 字舞流文

Mechanism of silicon exfoliation by hydrogen implantation and He, Li and Si co-implantation [SOI technology]

T. E. Haynes | Y. Chabal | W. Brown | D. Jacobson | W. Jackson | C. Hsieh | J. Sapjeta | S. Christman | M. Weldon | C. A. Goodwin | E. Chaban | V. Venezia | V. Marsico | A. Agarwal | Y. Caudano | M. Collot