论文信息 - NANOSTRUCTURED AlN/TiN FILMS GROWN BY REACTIVE SPUTTERING OR ION IMPLANTATION OF Al/Ti MULTILAYERS - 字舞流文

NANOSTRUCTURED AlN/TiN FILMS GROWN BY REACTIVE SPUTTERING OR ION IMPLANTATION OF Al/Ti MULTILAYERS

C. Jeynes | D. Peruško | P. Panjan | J. Kova | M. | M. Mitri | M. Milosavljevi | D. Pjevi | M. Obradovi | izmovi