论文信息 - Integrated piezoresistive pressure sensor with both voltage and frequency output

Integrated piezoresistive pressure sensor with both voltage and frequency output

Abstract An on-chip integrated piezoresistive pressure sensor with both voltage and frequency outputs has been developed. The sensor chip, having a size of 3 × 3.8 mm 2 , was realized by the use of a standard bipolar IC process. The output voltage span is 1 to 4 V for a pressure range of 0 to 750 mmHg. The pressure sensitivity of the voltage output is 4 mV/mmHg. The non-linearity is less than 0.4 % of the full scale. The sensitivity of the frequency output is about 30 kHz for a 750 mmHg change in pressure. The output is in the T 2 L level. The temperature coefficient of the sensitivity is less than 0.06%/°C in the temperature range −20 to 110 °C.

Susumu Sugiyama | Isemi Igarashi | Mitsuharu Takigawa

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