Design and fabrication of a gold electroplated electromagnetic and electrostatic hybrid MEMS relay
暂无分享,去创建一个
Bradley J. Nelson | Shan Guan | Karl Vollmers | Arunkumar Subramanian | B. Nelson | A. Subramanian | S. Guan | Karl Vollmers
[1] K. Petersen. Micromechanical membrane switches on silicon , 1979 .
[2] Jun Shen,et al. Latching micromagnetic relays , 2001 .
[3] F. H. Reid,et al. Gold Plating Technology , 1974 .
[4] G. Kovacs. Micromachined Transducers Sourcebook , 1998 .
[5] L. H. Bennett,et al. Classical Electromagnetic Theory , 1963 .