Investigation of the influence of graded-gap layer formed by annealing on the electrical properties of the near-surface of LPE HgCdTe using MIS structure

The influence of the near-surface graded-gap layer formed by annealing of HgCdTe grown by liquid phase epitaxy on the capacitance-voltage characteristics of its MIS structure was studied. We found that HgCdTe grown by LPE can form a near-surface graded-gap layer by annealing under specific conditions after CdTe passivation. After the near-surface graded-layer is generated, the performance of the HgCdTe surface layer has been changed significantly, showing as an increase of slow states, a decrease of fixed charge and the generation of single-level trap in the band gap. Furthermore, a Fermi level pinning phenomenon have been observed on the HgCdTe with graded-gap layer, highlighting the huge density of interface traps at the edge of the band. This effect may be attributed to the electric field generated by the graded-gap layer in HgCdTe driving minority carriers away from the interface. As a result, the surface recombination velocity of minority carriers is reduced. At the same time, it inhibits the oxidation reaction on the surface and consequently reduces the accumulation of fixed charges. During the annealing process to form the graded-layer, the defect system on the surface is reorganized, and the defect aggregation produces single-level defects and higher electron traps.

[1]  G. Ghibaudo,et al.  Analysis of the Electrical Properties of Different HgCdTe Passivations for Infrared Detectors , 2019, Journal of Electronic Materials.

[2]  Jarek Antoszewski,et al.  Progress, challenges, and opportunities for HgCdTe infrared materials and detectors , 2015 .

[3]  S. Dzyadukh,et al.  Hysteresis Phenomena in mis Structures Based on Graded-Gap MBE Hgcdte with a Two-Layer Plasma-Chemical Insulator SIO2/SI3N4 , 2015 .

[4]  Laurent Rubaldo,et al.  10μm pitch design of HgCdTe diode array in Sofradir , 2015, SPIE OPTO.

[5]  S. Dzyadukh,et al.  Capacitance-voltage characteristics of metal-insulator-semiconductor structures based on graded-gap HgCdTe with various insulators , 2012 .

[6]  M. V. Rao,et al.  Effect of Cycle Annealing Parameters on Dislocation Density Reduction for HgCdTe on Si , 2011 .

[7]  Susanne Stemmer,et al.  Comparison of methods to quantify interface trap densities at dielectric/III-V semiconductor interfaces , 2010 .

[8]  Michael A. Kinch,et al.  HgCdTe: Recent Trends in the Ultimate IR Semiconductor , 2010 .

[9]  W. E. Tennant,et al.  HgCdTe at Teledyne , 2009, Defense + Commercial Sensing.

[10]  Philippe Tribolet,et al.  Fifty years of successful MCT research and production in France , 2009, Defense + Commercial Sensing.

[11]  Michael A. Kinch,et al.  Fifty years of HgCdTe at Texas Instruments and beyond , 2009, Defense + Commercial Sensing.

[12]  Yi Deng,et al.  Vacuum baking effects on the I-V characteristics of LWIR HgCdTe photodiodes with different passivation , 2008, International Conference on Optical Instruments and Technology.

[13]  V. N. Ovsyuk,et al.  Analysis of voltage-capacitance curve of MIS-structure based on n- and p- MBE HgCdTe , 2007, International Conference on Photoelectronics and Night Vision Devices.

[14]  Antoni Rogalski,et al.  HgCdTe infrared detector material: history, status and outlook , 2005 .

[15]  V. Gopal,et al.  A CdTe passivation process for long wavelength infrared HgCdTe photo-detectors , 2005 .

[16]  S. Dzyadukh,et al.  The Influence of Resistance of the Epitaxial-Film Volume on the Capacity-Voltage Characteristics of the HgCdTe/AOF and HgCdTe/SiO2/Si3N4 MIS Structures , 2005 .

[17]  Tao Sun,et al.  Analysis of 1/f noise on LWIR HgCdTe photodiodes with different passivation , 2005, SPIE/COS Photonics Asia.

[18]  Jarek Antoszewski,et al.  Dark currents in long wavelength infrared HgCdTe gated photodiodes , 2004 .

[19]  J. Kim,et al.  Passivation of HgCdTe p-n diode junction by compositionally graded HgCdTe formed by annealing in a Cd/Hg atmosphere , 2002 .

[20]  R. K. Bhan,et al.  Effect of fixed charges due to a passivant on the performance of the HgCdTe overlap structure , 2002 .

[21]  I. Sabinina,et al.  Molecular-beam epitaxy of mercury-cadmium-telluride solid solutions on alternative substrates , 2001 .

[22]  J. Chu,et al.  Growth and characterization of liquid-phase epitaxial Hg1-xCdxTe films , 1996 .

[23]  Naoki Oda,et al.  DISLOCATION REDUCTION IN HGCDTE ON GAAS BY THERMAL ANNEALING , 1995 .

[24]  C. N. Berglund Surface states at steam-grown silicon-silicon dioxide interfaces , 1966 .

[25]  R. K. Pandey,et al.  Studies on surface processing and passivation of p-Hg1−xCdxTe , 2007 .