Computer methods for analysis and simulation of RBS and ERDA spectra

Abstract Since the seventies a large number of computer methods have been developed for data analysis in Rutherford backscattering spectrometry (RBS). A short review of published computer methods for ion scattering is presented. The majority of programs can be divided into two categories: the interactive spectrum synthesis and the spectrum analysis codes. In this paper recent trends and problems in the area of spectrum simulation are presented. I demonstrate the main methods and approaches on our RBX computer program. The program can use any particle-target combination and beam energy between 100 keV and 10 MeV. The calculations and fitting methods of non-Rutherford scattering cross section are included. The contributions from electronic screening, the corrected Bohr straggling and the geometrical straggling are discussed. The useful techniques for extracting an accurate depth-concentration profile directly from RBS or ERDA spectrum are discussed. Some examples of the discussed methods are also given.

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