MEMS switchable interdigital coplanar filter

This paper presents a tunable interdigital coplanar filter with tapped-line feedings. Microelectromechanical systems capacitors are used as a high contrast capacitive switch between a quarter-wavelength resonator and an open-ended stub to perform the frequency shift. A two-pole tunable filter with a 13% relative bandwidth has been designed, fabricated, and measured. The center frequency can be switched from 18.5 to 21.05 GHz with low return losses (less than 15 dB) and low insertion losses (3.5 dB).

[1]  Yong-Kweon Kim,et al.  Millimeter-wave micromachined tunable filters , 1999, IMS 1999.

[2]  Gabriel M. Rebeiz,et al.  A varactor-tuned RF filter , 2000 .

[3]  C. Person,et al.  Electronically Switchable Dual-Band Microstrip Interdigital Bandpass Filter For Multistandard Communication Applications , 2000, 2000 30th European Microwave Conference.

[4]  P. Guillon,et al.  Improvements in losses and size of frequency tunable coplanar filter structures using MMIC negative resistance chips for multistandard mobile communication systems , 2000, 2000 IEEE MTT-S International Microwave Symposium Digest (Cat. No.00CH37017).

[5]  A. Malczewski,et al.  RF MEMS‐based tunable filters , 2001 .

[6]  K. Sarabandi,et al.  Tunable lumped components with applications to reconfigurable MEMS filters , 2001, 2001 IEEE MTT-S International Microwave Sympsoium Digest (Cat. No.01CH37157).

[7]  Yong-Kweon Kim,et al.  Tunable millimeter-wave filters using a coplanar waveguide and micromachined variable capacitors , 2001 .

[8]  Gabriel M. Rebeiz,et al.  RF MEMS switches and switch circuits , 2001 .

[9]  Gabriel M. Rebeiz,et al.  A very low phase noise SiGe VCO at X-band frequencies , 2001, 2001 Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems. Digest of Papers (IEEE Cat. No.01EX496).

[10]  P. Blondy,et al.  Distributed MEMS Tunable Filters , 2001, 2001 31st European Microwave Conference.