论文信息 - Low-cost Technology For Multilayer Electroplated Parts Using Laminated Dry Film Resist

Low-cost Technology For Multilayer Electroplated Parts Using Laminated Dry Film Resist

An innovative technology for the realization of key elements of a microfabricated reduction unit is presented. In view of integrating the functions of gear, pinion and axle into one element, multilevel metal electroplating in a negative dry film resist mould (Riston) is used. Easier processing, inherent planarization for multilevel 3-D structures, vertical sidewalls and high thicknesses (20 - 50 /spl mu/m/level) are shown to be the main key features of dry films. To demonstrate the process feasibility a gear and pinion set with upper and lower axle posts has been realized with four levels of nickel.

[1] T. Christenson,et al. Metal micromechanisms via deep X-ray lithography, electroplating and assembly , 1992 .

[2] F. Rudolf,et al. Electrodeposition of 3D microstructures on silicon , 1993 .

[3] B. Löchel,et al. Galvanoplated 3D structures for micro systems , 1994 .

[4] W. Daniau,et al. Metallic microdevices fabricated by deep-etch UV lithography , 1993 .

[5] M Kufner,et al. Application of three-dimensional micro-optical components formed by lithography, electroforming, and plastic molding. , 1993, Applied optics.