论文信息 - Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Changes in the incident behavior of carbon ions - 字舞流文

Characterization of structural and mechanical properties of DLC films deposited on the surface of minute-scale 3D objects: Changes in the incident behavior of carbon ions

N. Ohtake | Takumi Ishikawa | Yuto Tameno | Yuki Hirata | Hiroki Akasaka | Hiroshige Matsuoka