Workspace investigation of a 3 DOF compliant micro-motion stage

This paper investigates the workspace of a three degree-of-freedom (DOF) compliant micro-motion stage with flexure hinges. This micro-motion stage has parallel structure for better stiffness and accuracy than serial structures and is driven by three PZT stack actuators. This kind of micro-motion stage can be used in applications including micro system assembly, biological cell manipulation and microsurgery. Nevertheless, workspace is fundamental. When selecting or designing micro-motion stage(s) for a particular application, its workspace must be studied to ensure the end-effector can reach the desired points with required orientations. In this paper the workspace of the presented micro-motion stage is investigated and presented, both mathematically and empirically.

[1]  E. C. Teague,et al.  Piezodriven 50‐μm range stage with subnanometer resolution , 1978 .

[2]  I. Her,et al.  A Linear Scheme for the Displacement Analysis of Micropositioning Stages with Flexure Hinges , 1994 .

[3]  Alain Codourey,et al.  Dynamic modelling and mass matrix evaluation of the DELTA parallel robot for axes decoupling control , 1996, Proceedings of IEEE/RSJ International Conference on Intelligent Robots and Systems. IROS '96.

[4]  Larry L. Howell,et al.  A Loop-Closure Theory for the Analysis and Synthesis of Compliant Mechanisms , 1996 .

[5]  Alain Codourey,et al.  Dynamic Modeling of Parallel Robots for Computed-Torque Control Implementation , 1998, Int. J. Robotics Res..

[6]  Quan Zhou,et al.  Position control of a 3 DOF piezohydraulic parallel micromanipulator , 1998, Proceedings. 1998 IEEE/RSJ International Conference on Intelligent Robots and Systems. Innovations in Theory, Practice and Applications (Cat. No.98CH36190).

[7]  P. Gao,et al.  A new piezodriven precision micropositioning stage utilizing flexure hinges , 1999 .

[8]  Wei Zhao,et al.  An experimental observation of uncoupling of multi-DOF PZT actuators in a compliant mechanism , 2002, 7th International Conference on Control, Automation, Robotics and Vision, 2002. ICARCV 2002..

[9]  Wei Zhao,et al.  The constant-Jacobian method for kinematics of a three-DOF planar micro-motion stage , 2002, J. Field Robotics.