High voltage pulsed power supply with high repetitive rate has found wide applications in industry, and military such as plasma source for ion implantation, microwave generator and high pulsed power laser. The conventional pulsed power supply is limited by gas switch with short lifetime and low repetitive frequency. In recent years Marx generator based on solid state switches has proposed. It has dual functions by combining high repetitive rate from semiconductor switch with voltage adder from Marx generator principle. The solid state switches can be MOSFET , IGBT or SCR. This all-solid-state pulsed power supply has multifold advantages such as flexibility of pulse voltage amplitude, pulse width and repetitive rate and long lifetime and compactness.