Electronic properties of antidot lattices fabricated by atomic force lithography

Antidot lattices were fabricated by atomic force lithography using local oxidation. High quality finite 20×20 lattices are demonstrated with periods of 300 nm. The low-temperature magnetoresistance shows well developed commensurability oscillations as well as a quenching of the Hall effect around zero magnetic field. In addition, we find B-periodic oscillations superimposed on the classical commensurability peaks at temperatures as high as 1.7 K. These observations indicate the high electronic quality of our samples.

[1]  K. Ensslin,et al.  Transport properties of quantum dots with steep walls , 2000, cond-mat/0009344.

[2]  K. Ensslin,et al.  Shifting a Quantum Wire through a Disordered Crystal: Observation of Conductance Fluctuations in Real Space , 1999, cond-mat/9909337.

[3]  K. Ensslin,et al.  In-plane gate single-electron transistor in Ga[Al]As fabricated by scanning probe lithography , 1999, cond-mat/9909340.

[4]  K. Ensslin,et al.  Fabricating tunable semiconductor devices with an atomic force microscope , 1999 .

[5]  Herbert Kroemer,et al.  Direct patterning of surface quantum wells with an atomic force microscope , 1998 .

[6]  Werner Wegscheider,et al.  In-plane gates and nanostructures fabricated by direct oxidation of semiconductor heterostructures with an atomic force microscope , 1998 .

[7]  M. Holland,et al.  Internal structure of a Landau band induced by a lateral superlattice: a glimpse of Hofstadter's butterfly , 1996 .

[8]  J. Kotthaus,et al.  Sharpened electron beam deposited tips for high resolution atomic force microscope lithography and imaging , 1995 .

[9]  E. Snow,et al.  Si nanostructures fabricated by anodic oxidation with an atomic force microscope and etching with an electron cyclotron resonance source , 1995 .

[10]  G. Hackenbroich,et al.  Periodic-Orbit Theory of Quantum Transport in Antidot Lattices , 1995 .

[11]  K. Richter Phase Coherence Effects in Antidot Lattices: A Semiclassical Approach to Bulk Conductivity , 1994, cond-mat/9410045.

[12]  Klein,et al.  Phase-coherent electrons in a finite antidot lattice. , 1994, Physical Review B (Condensed Matter).

[13]  Weimann,et al.  Quantized periodic orbits in large antidot arrays. , 1993, Physical review letters.

[14]  Weimann,et al.  Electron pinball and commensurate orbits in a periodic array of scatterers. , 1991, Physical review letters.

[15]  Petroff,et al.  Magnetotransport through an antidot lattice in GaAs-AlxGa1-xAs heterostructures. , 1990, Physical review. B, Condensed matter.

[16]  Albrecht,et al.  Evidence of Hofstadter's Fractal Energy Spectrum in the Quantized Hall Conductance. , 2001, Physical review letters.

[17]  K. Ensslin,et al.  Antidot superlattices: Classical chaos and quantum transport , 1995 .

[18]  Christie R. K. Marrian,et al.  Technology of proximal probe lithography , 1993 .

[19]  K. Ploog,et al.  Localization in GaAs electron-dots and anti-dots , 1991 .