Fundamental Principles and Issues of High-speed Piezoactuated Three-legged Motion for Miniature Robots Designed for Nanometer-scale Operations

One of the important aspects in the development of high-throughput platforms based on a fleet of scientific instruments in the form of miniature wireless robots designed for fast operations at the nanometer-scale, is the conception of an embedded locomotion system capable of fast displacements between two successive locations while being accurate enough to position the robot within the range of the embedded instrument, typically within a few tenths of nanometers. This paper describes not only the fundamental principles of the locomotion method and mechanisms but the main constraints, challenges, and environmental conditions that must be taken into account in the implementation of such a system. Preliminary experimental results show the validity of this approach.

[1]  A. Buerkle,et al.  Flexible microrobotic system MINIMAN: design, actuation principle and control , 1999, 1999 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (Cat. No.99TH8399).

[2]  S. Martel,et al.  Toward nanorobotics platforms for high-throughput biomedical applications at the nanometer-scale , 2002, Proceedings of the Second Joint 24th Annual Conference and the Annual Fall Meeting of the Biomedical Engineering Society] [Engineering in Medicine and Biology.

[3]  Toshio Fukuda,et al.  Cellular Robotics and Micro Robotic Systems , 1994, World Scientific Series in Robotics and Intelligent Systems.

[4]  Sylvain Martel,et al.  Infrastructure suited for supporting a fleet of wireless miniature robots designed for atomic-scale operations , 2001, Optics East.

[5]  K E Drexler,et al.  Molecular engineering: An approach to the development of general capabilities for molecular manipulation. , 1981, Proceedings of the National Academy of Sciences of the United States of America.

[6]  Reymond Clavel,et al.  Stick and slip actuators and parallel architectures dedicated to microrobotics , 1996, Other Conferences.

[7]  Ohmi Fuchiwaki,et al.  Flexible micro-processing by multiple microrobots in SEM , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).

[8]  Sylvain Martel,et al.  Nanofactories based on a fleet of scientific instruments configured as miniature autonomous robots , 2002 .

[9]  Sylvain Martel,et al.  Large-scale nanorobotic factory automation based on the NanoWalker technology , 2001, ETFA 2001. 8th International Conference on Emerging Technologies and Factory Automation. Proceedings (Cat. No.01TH8597).

[10]  Branislav Borovac,et al.  Development of platform for micro-positioning actuated by piezo-legs , 2000, Proceedings 2000 ICRA. Millennium Conference. IEEE International Conference on Robotics and Automation. Symposia Proceedings (Cat. No.00CH37065).

[11]  Reymond Clavel,et al.  Micro/nanofactory: concept and state of the art , 2000, SPIE Optics East.

[12]  Sylvain Martel,et al.  Three-legged wireless miniature robots for mass-scale operations at the sub-atomic scale , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).

[13]  Heinz Wörn,et al.  Remotely controllable mobile microrobots acting as nano positioners and intelligent tweezers in scanning electron microscopes (SEMs) , 2001, Proceedings 2001 ICRA. IEEE International Conference on Robotics and Automation (Cat. No.01CH37164).

[14]  Stefen Riebel,et al.  General description of the wireless miniature NanoWalker robot designed for atomic-scale operations , 2001, Optics East.

[15]  Farrell,et al.  Scanning tunneling microscope as a structure-modifying tool. , 1985, Physical review. B, Condensed matter.

[16]  Sylvain Martel,et al.  NanoWalker: a fully autonomous highly integrated miniature robot for nanoscale measurements , 1999, Industrial Lasers and Inspection.

[17]  Branislav Borovac,et al.  A platform for micropositioning based on piezo legs , 2001 .

[18]  Sylvain Martel,et al.  Fundamentals of piezoceramic actuation for micrometer and submicrometer motions for the NanoWalker robot , 2000, SPIE Optics East.

[19]  Sergej Fatikow,et al.  Autonomous Microrobots , 1997, J. Intell. Robotic Syst..

[20]  Carlos Canudas de Wit,et al.  A survey of models, analysis tools and compensation methods for the control of machines with friction , 1994, Autom..

[21]  Drexler Ke,et al.  Molecular engineering: An approach to the development of general capabilities for molecular manipulation. , 1981, Proceedings of the National Academy of Sciences of the United States of America.

[22]  Sylvain Martel,et al.  Miniature instrumented robots for mass-scale synthesis and characterization , 2000, 1st Annual International IEEE-EMBS Special Topic Conference on Microtechnologies in Medicine and Biology. Proceedings (Cat. No.00EX451).

[23]  Giovanni Muscato,et al.  PLIF: piezo light intelligent flea-new micro-robots controlled by self-learning techniques , 1997, Proceedings of International Conference on Robotics and Automation.

[24]  Zollikofer.  STEPPING PATTERNS IN ANTS - INFLUENCE OF SPEED AND CURVATURE , 1994, The Journal of experimental biology.