论文信息 - Transduction mechanisms and their applications in micromechanical devices

Transduction mechanisms and their applications in micromechanical devices

Transduction mechanisms and their applications in micromechanical actuators and resonating sensors are presented. They include piezoelectric, dielectric, electro-thermo-mechanic, opto-thermo-mechanic, and thermo-pneumatic mechanisms. Advantages and disadvantages with respect to technology and performance are discussed.<<ETX>>

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