Impact of wavelength of UV light and UV cure time on chemical and mechanical properties of PECVD deposited porous ultra low-k films

[1]  K. Vanstreels,et al.  Influence of the UV Cure on Advanced Plasma Enhanced Chemical Vapour Deposition Low-k Materials , 2011 .

[2]  P. Verdonck,et al.  Effect of ultraviolet curing wavelength on low-k dielectric material properties and plasma damage resistance , 2011 .

[3]  P. Verdonck,et al.  Porogen residues detection in optical properties of low-k dielectrics cured by ultraviolet radiation , 2010 .

[4]  Denis Shamiryan,et al.  Improving mechanical robustness of ultralow-k SiOCH plasma enhanced chemical vapor deposition glasses by controlled porogen decomposition prior to UV-hardening , 2010 .

[5]  Kris Vanstreels,et al.  Nanoindentation study of thin plasma enhanced chemical vapor deposition SiCOH low-k films modified in He/H2 downstream plasma , 2010 .

[6]  Denis Shamiryan,et al.  Effect of Porogen Residue on Chemical, Optical, and Mechanical Properties of CVD SiCOH Low-k Materials , 2009 .

[7]  M. Buchmeiser,et al.  Effect of pressure on efficiency of UV curing of CVD-derived low-k material at different wavelengths , 2008 .

[8]  Chuan-Pu Liu,et al.  The effect of oxygen content on bonding configuration and properties of low-k organosilicate glass dielectric film , 2008 .

[9]  Chang Young Kim,et al.  Characteristics of low-k SiOC(–H) films deposited at various substrate temperature by PECVD using DMDMS/O2 precursor , 2007 .

[10]  G. Beyer,et al.  Characterization and optimization of porogen-based PECVD deposited extreme low-k materials as a function of UV-cure time , 2007 .

[11]  K. Gleason,et al.  Effects of condensation reactions on the structural, mechanical, and electrical properties of plasma-deposited organosilicon thin films from octamethylcyclotetrasiloxane , 2005 .

[12]  S. Rhee,et al.  Nanocomposite Low-k SiCOH Films by Direct PECVD Using Vinyltrimethylsilane , 2004 .

[13]  Karen Maex,et al.  Low dielectric constant materials for microelectronics , 2003 .

[14]  Michael Thorpe,et al.  Continuous deformations in random networks , 1983 .

[15]  J. C. Phillips,et al.  Topology of covalent non-crystalline solids I: Short-range order in chalcogenide alloys , 1979 .