A Study on Optimal Operation Conditions for an Electronic Device Alignment System by Using Design of Experiments

Purpose: The purpose of this study is to design a systematic method to estimate optimal operation conditions of design variables for an electronic device alignment system. Method: The 2-level factorial design and the central composite design are used in order to plan experiments. Based on the experiment results, a regression model is established to find optimal conditions for the design variables. Results: 3 of 5 design variables are selected as major factors that affect the alignment system significantly. The optimized condition for each variable is estimated by using a sequential experiment plan and a quadratic regression model. Conclusion: The method designed in this study provides an efficient and systematic plan to select the optimized operation condition for the design variables. The method is expected to improve inspection accuracy of the system and reduce the development cost and period.

[1]  Michael Healey,et al.  Modern Design of Experiments Techniques to Optimize a Leading Edge Extension Fence (Invited) , 2003 .

[2]  Tetsuo Kitabayashi,et al.  Electrostatic Force and Absorption Current of Alumina Electrostatic Chuck , 1992 .

[3]  Jae Seok Choi,et al.  Physical Modeling and Characteristics of a Johnsen-Rahbek Type Electrostatic Chuck , 2006 .

[4]  Toshiya Watanabe,et al.  Relationship between Electrical Resistivity and Electrostatic Force of Alumina Electrostatic Chuck , 1993 .

[5]  조웅,et al.  Optimal Design of the 6th Generation LCD Glass Using the Taguchi Method , 2008 .

[6]  Kazutoshi Asano,et al.  Fundamental study of an electrostatic chuck for silicon wafer handling , 1997, IAS '97. Conference Record of the 1997 IEEE Industry Applications Conference Thirty-Second IAS Annual Meeting.

[7]  S. G. Ponnambalam,et al.  Modeling and simulation of Electrostatic Adhesion for Wall Climbing Robot , 2011, 2011 IEEE International Conference on Robotics and Biomimetics.

[8]  Margaret J. Robertson,et al.  Design and Analysis of Experiments , 2006, Handbook of statistics.

[9]  Jong In Park,et al.  An Optimum Design of Secondary Battery using Design of Experiments with Mixture , 2005 .

[10]  Statistical Properties of Second Type Central Composite Designs , 2006 .

[11]  Keun Park,et al.  Application of Design of Experiments and Numerical Analysis to Optimal Design for Injection Molding Processes of Electrical Parts , 2002 .

[12]  Jeon Jong-Up.  Electrostatic Suspension and Transportation Device of Glass Panels , 2006 .

[13]  T. Watanabe,et al.  Electrostatic charge distribution in the dielectric layer of alumina electrostatic chuck , 1994, Journal of Materials Science.