Evaluation of biodegradable coating on the stiffness control of the polyimide-based probe used in neural devices

In this work, an assembled and integrated flexible probe array with biodegradable coating for stiffness control is demonstrated. The proposed method will help to overcome the stiffness issue faced by polymeric probe array during insertion into the brain tissue. It is proposed to do coating with biodegradable material to increase the stiffness of the probe shanks. Assembly process is simplified as polymer probe and cable were being monolithically fabricated, only the connector needs to be soldered onto the bonding pads. To enhance the soldering between connector and bonding pads, rigid stiffener is designed at the bonding pads region to provide robust support for soldering process and for insertion process.

[1]  T. Stieglitz,et al.  Micromachined, Polyimide-Based Devices for Flexible Neural Interfaces , 2000 .

[2]  F. Solzbacher,et al.  Integrated wireless neural interface based on the Utah electrode array , 2009, Biomedical microdevices.

[3]  Chris Van Hoof,et al.  Fabrication technique of a compressible biocompatible interconnect using a thin film transfer process , 2011 .

[4]  P. Tresco,et al.  Response of brain tissue to chronically implanted neural electrodes , 2005, Journal of Neuroscience Methods.

[5]  Ming-Yuan Cheng,et al.  3D probe array integrated with a front-end 100-channel neural recording ASIC , 2014 .

[6]  J. Minkyu,et al.  Out-of-plane connection in an orthogonal assembly , 2012, 2012 IEEE 14th Electronics Packaging Technology Conference (EPTC).

[7]  Sam Musallam,et al.  NeuroMEMS: Neural Probe Microtechnologies , 2008, Sensors.

[8]  Lei Yao,et al.  A low-profile three-dimensional neural probe array using a silicon lead transfer structure , 2013 .

[9]  Ying Yao,et al.  A Microassembled Low-Profile Three-Dimensional Microelectrode Array for Neural Prosthesis Applications , 2007, Journal of Microelectromechanical Systems.

[10]  J. Sharma,et al.  高アスペクト比MEMSデバイス製造のためのSF 6 ,BCl 3 およびArベースの処方を用いるモリブデンエッチング , 2013 .

[11]  U.G. Hofmann,et al.  On-demand neural probes , 2003, TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664).

[12]  Jiping He,et al.  Polyimide based neural implants with stiffness improvement , 2004 .

[13]  Robert Puers,et al.  An interconnect for out-of-plane assembled biomedical probe arrays , 2008 .