SOLUTION APPROACHES FOR THE CLUSTER TOOL SCHEDULING PROBLEM IN SEMICONDUCTOR MANUFACTURING
暂无分享,去创建一个
[1] Mathias A. Dümmler,et al. Using simulation and genetic algorithms to improve cluster tool performance , 1999, WSC '99.
[2] H. Niedermayer,et al. A SIMULATION-BASED ANALYSIS OF THE CYCLE TIME OF CLUSTER TOOLS IN SEMICONDUCTOR MANUFACTURING , 2003 .
[3] R. S. Gyurcsik,et al. Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput , 1996 .
[4] Fengyuan Ren,et al. Scheduling " , , 1997 .
[5] John W. Fowler,et al. A Modified Shifting Bottleneck Heuristic for Scheduling Wafer Fabrication Facilities , 2002 .
[6] John W. Fowler,et al. DETERMINISTIC SCHEDULING OF WAFER FAB OPERATIONS , 2003 .
[7] Reha Uzsoy,et al. Decomposition Methods for Complex Factory Scheduling Problems , 1996 .
[8] R. S. Gyurcsik,et al. Single-wafer cluster tool performance: an analysis of throughput , 1994 .