Robust line width estimation

Fabrication of diffused titanium optical guides on a LiNbO/sub 3/ crystal substrate requires precise quality assurance. Light couplers in particular must be positioned within micron specifications. This requirement is the reason that the width of lines detected during microscopic inspection of the crystal is such an important parameter for quality evaluation. To assist in the inspection of these optical guides, a line width estimation program has been developed for an IBM PC based microscope inspection system. A digital image processing approach is used to develop an algorithm which can be tailored by the user for specific signal and noise characteristics. Default filter parameters, which can be updated and saved interactively by the user, are stored in a file on disk. The final program can be executed stand-alone or through a commercially available, menu-driven, image processing software package. Details concerning the implementation of this program are presented in this report. These include instructions for using the program, a description of the voting approach to edge detection, and a discussion of the line fitting subroutine. 5 refs., 1 fig. (DWL)