Efficient CFD modeling of single wafer semiconductor fabrication systems for closed-loop evaluation

General finite element models of single wafer systems that describe the dynamics of both solids and gas flow are usually unsuited for quick design iterations, because of computational complexity. In this paper a more efficient alternative is proposed. Solids can be modeled efficiently and with sufficient accuracy using a finite volume approach, and the gas flow can be modeled by finite element CFD software. The gas flow model can then be coupled to the solids model by iterating on the heat transfer coefficients at the interface.