论文信息 - Investigations on titanium oxide film as an alternative heat sensitive material

Investigations on titanium oxide film as an alternative heat sensitive material

In this article, substoichiometric titanium oxide thin films (TiOX) are prepared with the reactive DC sputtering in an oxygen and argon atmosphere and then annealed in an oxygen atmosphere. Under a set of optimum deposition parameters, TiOX film with sheet resistance value of 167.9 KΩ/(box) and TCR value of -3.30%/K obtained. Transmittance of the optimum film is obtained in the 300≤λ≤1100nm wavelength range at room temperature. Thickness, near-infrared absorptance, and other properties of the optimum film are also investigated in this paper.

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