Precision Nanometrology: Sensors and Measuring Systems for Nanomanufacturing

Angle Sensor for Measurement of Surface Slope and Tilt Motion.- Laser Autocollimator for Measurement of Multi-axis Tilt Motion.- Surface Encoder for Measurement of In-plane Motion.- Grating Encoder for Measurement of In-plane and Out-of-plane Motion.- Scanning Multi-probe System for Measurement of Roundness.- Scanning Error Separation System for Measurement of Straightness.- Scanning Micro-stylus System for Measurement of Micro-aspherics.- Large Area Scanning Probe Microscope for Micro-textured Surfaces.- Automatic Alignment Scanning Probe Microscope System for Measurement of 3D Nanostructures.- Scanning Image-sensor System for Measurement of Micro-dimensions.