论文信息 - Evolution of the Co–N/Ti/Si System in Magnetron Sputtering of Co onto a Heated Ti/Si(100) Substrate - 字舞流文

Evolution of the Co–N/Ti/Si System in Magnetron Sputtering of Co onto a Heated Ti/Si(100) Substrate

A. G. Vasiliev | A. Orlikovsky | A. Vasiliev | A. Vasiliev | R. Zakharov | I. Horin | M. Eindou