Microengineering aerospace systems

This is a textbook tutorial encompassing MEMS (micro-electromechanical systems), nanoelectronics, packaging, processing and materials characterization for developing miniaturized smart instruments for aerospace systems, satellites and satellite subsystems.

[1]  Bumkyoo Choi,et al.  Deep X-ray and UV lithographies for micromechanics , 1990, IEEE 4th Technical Digest on Solid-State Sensor and Actuator Workshop.

[2]  Ljubiša Ristić,et al.  Sensor Technology and Devices , 1994 .

[3]  M. Mehregany,et al.  Integrated fabrication of polysilicon mechanisms , 1988 .

[4]  Yu-Chong Tai,et al.  IC-processed electrostatic micro-motors , 1988, Technical Digest., International Electron Devices Meeting.

[5]  R. Finne,et al.  A Water‐Amine‐Complexing Agent System for Etching Silicon , 1967 .

[6]  Fusao Shimokawa,et al.  Fast and extremely selective polyimide etching with a magnetically controlled reactive ion etching system , 1991, [1991] Proceedings. IEEE Micro Electro Mechanical Systems.

[7]  Yu-Chong Tai,et al.  Integrated movable micromechanical structures for sensors and actuators , 1988 .

[8]  Thomas R. Ohnstein,et al.  Tunable IR filters using flexible metallic microstructures , 1995, Proceedings IEEE Micro Electro Mechanical Systems. 1995.

[9]  K.E. Petersen,et al.  Silicon as a mechanical material , 1982, Proceedings of the IEEE.

[10]  Shuvo Roy,et al.  Microfabricated ice-detection sensor , 1997, Smart Structures.

[11]  W.H. Ko,et al.  A high-sensitivity integrated-circuit capacitive pressure transducer , 1982, IEEE Transactions on Electron Devices.

[12]  R. Howe.  Surface micromachining for microsensors and microactuators , 1988 .

[13]  Renshi Sawada,et al.  Micro-grid fabrication of fluorinated polyimide by using magnetically controlled reactive ion etching (MC-RIE) , 1993, [1993] Proceedings IEEE Micro Electro Mechanical Systems.

[14]  M. Allen,et al.  A fully integrated micromagnetic actuator with a multilevel meander magnetic core , 1992, Technical Digest IEEE Solid-State Sensor and Actuator Workshop.

[15]  M. Mehregany,et al.  High-aspect-ratio photolithography for MEMS applications , 1995 .