论文信息 - Record GmSAT/SSSAT and PBTI Reliability in Si-Passivated Ge nFinFETs by Improved Gate-Stack Surface Preparation - 字舞流文

Record GmSAT/SSSAT and PBTI Reliability in Si-Passivated Ge nFinFETs by Improved Gate-Stack Surface Preparation

K. Wostyn | H. Dekkers | D. Mocuta | N. Horiguchi | N. Collaert | L. Ragnarsson | R. Loo | J. Mitard | L. Witters | H. Arimura | T. Conard | G. Boccardi | D. Cott | S. Suhard | V. De Heyn | D. V. van Dorp