Fabrication of polymeric large-core waveguides for optical interconnects using a rubber molding process

Polymeric large-core (47 /spl mu/m/spl times/41 /spl mu/m) optical waveguides for optical interconnects have been fabricated by using a rubber molding process. For low-cost low-loss large-core waveguides, our newly developed thick-photoresist patterning process is used for a master fabrication. Also a low-loss thermocurable polymer, perfluorocyclobutane (PFCB), is used in fabricating optical waveguides by rubber molding for the first time. The propagation loss is measured to be 0.4 dB/cm at the wavelength of 1.3 /spl mu/m, and 0.7 dB/cm at the wavelength of 1.55 /spl mu/m.

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