论文信息 - Chemical Composition of High Dose Implants in Silicon and Germanium - 字舞流文

Chemical Composition of High Dose Implants in Silicon and Germanium

S. Kalbitzer | M. Prager | H. Kräutle | H. Grahmann | A. Feuerstein | F. Hasselbach

[1] W. E. Baylis,et al. Energy Spectra of keV Backscattered Protons as a Probe for Surface-Region Studies , 1971 .