Arrays of addressable contactless optical microshutters

The present paper describes the development of contactless optical microshutter arrays, which are mounted in an assembly of microlenses, optical fibers and driving electronics. In the past, complete systems have been made, for different applications, by using microshutters with contacting surfaces. We have been able to demonstrate the functionality of these complete devices, but in-use stiction limited their lifetime. The arrays also showed short-circuit due to shutters jumping over the electrodes, because of an asymmetrical electrical field distribution.Despite years of advancements in micromachining technologies, in-use stiction remains a fundamental issue in micro electro-mechanical systems (MEMS), resulting in device failure. Anti-stiction layers have been developed and even industrialized, but they require hermetically sealed devices or have a limited lifetime. A more drastic solution to solve in-use stiction and jump over is to resort to a device without any mechanical stopper. After having considered several solutions, we have designed, manufactured and successfully tested contactless shutters.