A Modular Miniaturized Chemical Analysis System

Abstract A modular miniaturized system for flow-injection analysis (FIA) is presented, based on two piezoelectric silicon micropumps and an ISFET-based flow-through cell for the measurement of ion concentrations. The active elements of the system are stacked together and measure only 22 mm × 22 mm × 12 mm in total. The small dimensions ensure a very low consumption of calibration and carrier solutions and are very attractive for the development of hand-held analysers.